File:EUV Stochastic Limits.png
Size of this preview: 730 × 600 pixels. Other resolutions: 292 × 240 pixels | 584 × 480 pixels | 767 × 630 pixels.
Original file (767 × 630 pixels, file size: 30 KB, MIME type: image/png)
 | This is a file from the Wikimedia Commons. Information from its description page there is shown below. Commons is a freely licensed media file repository. You can help. |
Summary
| Description | Stochastic defects limit the resolution of EUV. At 36 nm pitch, the defect rate does not drop below a floor level ~1e-9. Unopened trenches at larger pitches become less likely at larger widths, while broken resist lines at dense pitches become more likely at the same time. Stochastic defects apply to contact as well as line patterns. Ref.: P. De Bisschop and E. Hendrickx, Proc. SPIE 10957, 109570E (2019). |
| Date | |
| Source | PowerPoint |
| Author | Guiding light |
Licensing
Guiding light at English Wikipedia, the copyright holder of this work, hereby publishes it under the following licenses:
|
Permission is granted to copy, distribute and/or modify this document under the terms of the GNU Free Documentation License, Version 1.2 or any later version published by the Free Software Foundation; with no Invariant Sections, no Front-Cover Texts, and no Back-Cover Texts. A copy of the license is included in the section entitled GNU Free Documentation License. |
This file is licensed under the Creative Commons Attribution-Share Alike 4.0 International license.
Attribution: Guiding light at English Wikipedia
- You are free:
- to share – to copy, distribute and transmit the work
- to remix – to adapt the work
- Under the following conditions:
- attribution – You must give appropriate credit, provide a link to the license, and indicate if changes were made. You may do so in any reasonable manner, but not in any way that suggests the licensor endorses you or your use.
- share alike – If you remix, transform, or build upon the material, you must distribute your contributions under the same or compatible license as the original.
You may select the license of your choice.
Original upload log
The original description page was here. All following user names refer to en.wikipedia.
| Date/Time | Dimensions | User | Comment |
|---|---|---|---|
| 2019-04-15 14:56:39 | 767 × 630 | Guiding light | |
| 2019-04-15 13:01:30 | 1486 × 326 | Guiding light | |
| 2019-04-14 10:15:46 | 377 × 326 | Guiding light | |
| 2019-04-13 15:57:48 | 377 × 326 | Guiding light | Uploading a self-made file using [[Wikipedia:File_Upload_Wizard|File Upload Wizard]] |
|
This media file is uncategorized.
Please help improve this media file by adding it to one or more categories, so it may be associated with related media files (how?), and so that it can be more easily found.
Please notify the uploader with {{subst:Please link images|File:EUV Stochastic Limits.png}} ~~~~ |
File history
Click on a date/time to view the file as it appeared at that time.
| Date/Time | Thumbnail | Dimensions | User | Comment | |
|---|---|---|---|---|---|
| current | 16:02, 2 April 2020 | | 767 × 630 (30 KB) | Hippymoose17 | Transferred from en.wikipedia (MTC!) (1.1.0) |
File usage
The following pages on the English Wikipedia use this file (pages on other projects are not listed):
