File:SALELE at a glance.png

Page contents not supported in other languages.
This is a file from the Wikimedia Commons
From Wikipedia, the free encyclopedia

SALELE_at_a_glance.png ‎(299 × 149 pixels, file size: 2 KB, MIME type: image/png)

This image could be re-created using vector graphics as an SVG file. This has several advantages; see Commons:Media for cleanup for more information. If an SVG form of this image is available, please upload it and afterwards replace this template with {{vector version available|new image name}}.


It is recommended to name the SVG file “SALELE at a glance.svg”—then the template Vector version available (or Vva) does not need the new image name parameter.

Summary

Description
English: Self-aligned litho-etch-litho-etch (SALELE) involves the use of spacers (grey) to help align trenches (red) patterned after earlier trenches (blue). The trenches are cut at different stages (yellow, purple). [1][2]
Date
Source Own work
Author Guiding light

Licensing

I, the copyright holder of this work, hereby publish it under the following license:
w:en:Creative Commons
attribution share alike
This file is licensed under the Creative Commons Attribution-Share Alike 4.0 International license.
You are free:
  • to share – to copy, distribute and transmit the work
  • to remix – to adapt the work
Under the following conditions:
  • attribution – You must give appropriate credit, provide a link to the license, and indicate if changes were made. You may do so in any reasonable manner, but not in any way that suggests the licensor endorses you or your use.
  • share alike – If you remix, transform, or build upon the material, you must distribute your contributions under the same or compatible license as the original.

References

  1. ↑ SALELE double patterning for 7nm and 5nm nodes
  2. ↑ Y. Drissi et al., Proc. SPIE 10962, 109620V (2019).

Captions

Plan view of SALELE process steps, taken together

Items portrayed in this file

depicts

inception

24 March 2021

File history

Click on a date/time to view the file as it appeared at that time.

Date/TimeThumbnailDimensionsUserComment
current01:08, 24 March 2021Thumbnail for version as of 01:08, 24 March 2021299 × 149 (2 KB)Guiding lightUploaded own work with UploadWizard
The following pages on the English Wikipedia use this file (pages on other projects are not listed):

Metadata

This file contains additional information, probably added from the digital camera or scanner used to create or digitize it.

If the file has been modified from its original state, some details may not fully reflect the modified file.

Retrieved from "https://en.wikipedia.org/wiki/File:SALELE_at_a_glance.png"