Journal of Micro/Nanopatterning, Materials, and Metrology

Journal of Micro/Nanopatterning, Materials, and Metrology is a peer-reviewed scientific journal published quarterly by SPIE. It covers science, development, and practice of micro and nanofabrication processes and metrology. Established in 2002 under the name Journal of Microlithography, Microfabrication, and Microsystems, it was subsequently retitled to Journal of Micro/Nanolithography, MEMS, and MOEMS in 2007. The journal title was changed to its current name in 2021.

The editor-in-chief of the journal is Harry Levinson (HJL Lithography).

Abstracting and indexing
The journal is abstracted and indexed in: • Current Contents/Electronics & Telecommunications Collection

• Current Contents/Engineering, Computing & Technology

• Current Contents/Physical, Chemical & Earth Sciences

• EBSCO databases

• Ei Compendex

• Inspec

• Science Citation Index Expanded

• Scopus

According to the Journal Citation Reports, the journal has a 2022 impact factor of 2.3.