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nano-PSI is a device at the Dutch Institute For Fundamental Energy Research (DIFFER). It is used for experimental physics research. PSI stands for Plasma Surface Interactions.

The subtrate is held at a substrate holder in position in a low-pressure vessel. Due to the plasma created using a Cascaded Arc Plasma Source, an energetic partical flux arives at the surface of the substrate. This enhaces surface modifications, Plasma processing.

The subbstrate holder can be biased and heated or cooled. A capacitor bank can be used to create large heat fluxes. Gasses like Helium, Nitrogen, Argon, Xenon can be used as a process gas. A Langmuir probe can be used for termining plasma conditions.

See also:
 * Solar fuel
 * Pulsed laser deposition
 * Gas discharge plasmas and their applications.
 * Semiconductor manufacturing; Plasma-enhanced chemical vapor deposition
 * National Spherical Torus Experiment in nuclear fusion