User:Lone Skeptic/Development/Bosch process

The Bosch process is a microfabrication technique that employs a switched chemistry and high density plasma to etch deep, high aspect ratio features into silicon. It is a type of deep reactive-ion etching (DRIE), and the terms DRIE and Bosch process are often used interchangeably. It was developed by Franz Laermer and Andrea Urban at Robert Bosch GmbH, from which the Bosch process derives its name. Originally created as part of a project to design MEMS airbag sensors, the Bosch process has since become ubiquitous in the MEMS industry, enabling many diverse applications. In acknowledgement of this wide-ranging impact, Laermer and Urban were recognized in 2007 as European Inventor(s) of the Year in the industry category.

The Bosch process is patented, so a license is required to run the process. Generally, the licensing cost is included in the equipment cost of equipment that runs the process.

Process
include at least one schematic image