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Neutral Atom Microscope
A neutral atom microscope (NAM) is a type of microscope that produces images of a sample through the use of non-charged atomic or molecular gas. To date, this has been done by scattering a beam of gas atoms, of low energy (thermal, 0.01-0.1eV), from the sample surface, in a vacuum. Also called atomic de Broglie microscope, or scanning helium microscope (SHeM) when helium is used as the probing atom. The result is perhaps the most non interacting, non-damaging surface imaging technique known. Without a net charge, the probe particles do not drive physical and chemical changes in the sample as SEMs and FIBs do. With their extremely low energy the probe particles do not penetrate the first atomic layer of the sample as SEMs FIBs and Optical microscopes do (typical charged particle beam and light penetration depth is on the order of 10's to 100's of nm). With high mass relative to electrons, even at such low energy the de Broglie wavelength for the particles shows the theoretical possibility of sub-nm resolution. For these reasons researchers have pursued development of this technique for several decades.

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Herstory
The resolution of optical GIANT LASERS is limited to a few hundred nanometers by the wave properties of the light.