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Tokyo Electron ja:東京エレクトロン

Tokyo Electron Limited (東京エレクトロン株式会社), or TEL, is an industrial electronics company headquartered in Akasaka,Minato-ku, Tokyo, Japan. TEL is best known as a supplier of equipment tofabricate integrated circuits (IC), flat panel displays(FPD), and photovoltaic cells (PV). Tokyo Electron Device (東京エレクトロンデバイス株式会社), or TED, is a subsidiary of TEL specializing in semiconductor devices, electronic components, networking devices, and related software.

As of 2011, TEL is the largest manufacturer of IC and FPD production equipment in Japan and the third largest in the world. The company was founded as Tokyo Electron Laboratories, Inc. in 1963.

Origins
On November 11, 1963, Tokyo Electron Laboratories Incorporated was founded by Tokuo Kubo and Toshio Kodaka, largely funded by Tokyo Broadcasting System (TBS), with a capital of over five million yen. Later that year, their office opened in the TBS main building and began manufacturing thousands of quality-control and importing diffusion furnaces made by Thermco and selling Japanese-made car radios.

In 1965, the company approached a rapidly growing business in the market, Fairchild SemiconductorCorporation and agreed to serve as a sales agency for them, increasing their capital to twenty million yen and began exporting IC testers, IC sockets, IC connectors, and other similar computer components.

They opened a new office in San Francisco, California and their new branch, Pan Electron in 1968 establishing themselves as the only stocking distributor of imported electronic components in the region.

One year later, they opened their still-functioning Yokohama office and established Teltron, a major manufacturer and distributor of car stereos, expanding their headquarters to fill the entire TBS-2 building and raising their capital to 100 million yen.

Semiconductor Production Equipment (SPE)
TEL produces Semiconductor Production Equipment (SPE) for the following purposes:
 * Thermal processing
 * Deposition of thin layers of dielectric material between transistors onto the silicon wafer surface in a heated low-pressure chemical vapor deposition (LPCVD) or oxidation process


 * Photoresist coating/developing
 * Photoresist coating and developing to project a microscopic circuitry pattern on the wafer inphotolithography


 * Plasma etching
 * Wet surface preparation
 * Wafer surface cleaning to remove foreign particles or contaminants such as dust
 * Wafer surface cleaning to remove foreign particles or contaminants such as dust


 * Single wafer chemical vapor deposition
 * Deposition of thin layers of various materials, such as tungsten, tungsten silicide, titanium,titanium nitride, and tantalum oxide


 * Wafer probing
 * Wafer probers for testing the functionality and performance of each die on the wafer


 * Material modification/doping
 * Surface modification and doping using gas cluster ion beam (GCIB) technology


 * Corrective etching/trimming
 * Corrective etching and trimming of thin films such as silicon, silicon nitride, silicon dioxide, aluminium nitride, and metals


 * Integrated metrology (co-developed by TEL and KLA Tencor)

FPD Production Equipment
FPD Coater/Developers FPD Etch/Ash Systems

Consolidated subsidiaries
The Tokyo Electron Group consists of TEL and the following consolidated subsidiaries.

Japan

 * Tokyo Electron Device Limited
 * Tokyo Electron Yamanashi Limited
 * Tokyo Electron Kyushu Limited
 * Tokyo Electron Tohoku Limited
 * Tokyo Electron Miyagi Limited
 * Tokyo Electron TS Limited
 * Tokyo Electron Technology Development Institute, Inc.
 * Tokyo Electron Software Technologies Limited
 * Tokyo Electron PV Limited
 * Tokyo Electron FE Limited
 * Tokyo Electron BP Limited
 * Tokyo Electron Agency Limited
 * Pan Electron Limited

Korea, Taiwan, China, and India

 * Tokyo Electron Korea Limited
 * Tokyo Electron Korea Solution Limited
 * Tokyo Electron Taiwan Limited
 * Tokyo Electron (Kunshan) Limited
 * Tokyo Electron (Shanghai) Limited
 * Tokyo Electron (Shanghai) Logistic Center Limited
 * Tokyo Electron Device Hong Kong Limited
 * Tokyo Electron Device Singapore Pte. Ltd.
 * Tokyo Electron India Private Limited

North America

 * Tokyo Electron U.S. Holdings, Inc.
 * Tokyo Electron America, Inc.
 * Tokyo Electron Massachusetts, LLC
 * Timbre Technologies, Inc.
 * TEL Technology Center, America, LLC
 * TEL Epion Inc.
 * TEL Venture Capital, Inc.

Europe and Israel

 * Tokyo Electron Europe Limited — Head Office (Crawley, England)
 * German Branch
 * Italian Branch
 * Netherlands Branch
 * Irish Branch
 * French Branch
 * Tokyo Electron Israel Limited

Japan
TEL's Technology Development Center and Leading-edge Process Development Center is located in Nirasaki, Yamanashi. TEL also has theKansai Technology Center in Amagasaki, Hyogo Prefecture and the Sendai Design and Development Center in Sendai, Miyagi Prefecture. Tokyo Electron Technology Development Institute TEL Technology Center, Tsukuba

Korea
Process Technology Center Tokyo Electron Korea Solution

Taiwan
TEL Technology Center, Taiwan

United States
TEL Technology Center, America, LLC in Albany, New York is the R&D center in the United States.

Belgium
TEL is one of the partners of IMEC, a microelectronics andnanoelectronics research center in Leuven, Belgium.

Sponsorship
TEL supports association football in Japan by sponsoring the J. League as a whole and the football club Ventforet Kofu based in Kofu and Nirasaki as well as the rest of Yamanashi Prefecture.

The company has acquired naming rights of two multipurpose halls:
 * "Tokyo Electron Nirasaki Ars Hall" (ja:韮崎市文化ホール) owned by Nirasaki City
 * "Tokyo Electron Hall Miyagi" (ja:宮城県民会館) owned by Miyagi Prefecture (currently closed due to the heavy earthquake damage)