User talk:BC Yang

Hi. Is there any plasma system expert who knows the meaning of plasma power density? I saw they were saying that word, saying the density is, for example, 0.1W/square cm. Does that mean a total power delivered to a plasma system (chamber for deposition or etch) from a generator devided by the size of a Si wafer? You can e-mail me the answer to byungchun_yang@yahoo.com as well. Thank you for helping me in advance. BC Yang