Phosphoryl fluoride

Phosphoryl fluoride (commonly called phosphorus oxyfluoride) is a compound with the chemical formula POF3. It is a colorless gas that hydrolyzes rapidly. It has a critical temperature of 73 °C and a critical pressure of 4.25 bars.

Synthesis and reactions
Phosphorus oxyfluoride is prepared by partial hydrolysis of phosphorus pentafluoride.

Phosphorus oxyfluoride is the progenitor of the simple fluorophosphoric acids by hydrolysis. The sequence starts with difluorophosphoric acid:
 * POF3 + H2O → HPO2F2 + HF

The next steps give monofluorophosphoric acid and phosphoric acid:
 * HPO2F2 + H2O → H2PO3F + HF
 * H2PO3F + H2O → H3PO4 + HF

Phosphoryl fluoride combines with dimethylamine to produce dimethylaminophosphoryl difluoride (H3C\s)2N\sP(\dO)F2 and difluorophosphate and hexafluorophosphate ions.